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Microelectronic and microelectromechanical systems
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Materials science
42L, 64T
Electromechanical engineering
4L, 8T
Nanoelectronics
3L, 6T
Microtechnology
9L, 11T
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The list
Microelectronic and microelectromechanical systems
includes
Fariborz Maseeh
,
Microelectromechanical systems
,
InvenSense
and
CEA-Leti: Laboratoire d'électronique des technologies de l'information
. The list consists of 5 members and 1 sublist.
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MEMS factories
3T
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Teledyne DALSA
STMicroelectronics
TSMC
Fariborz Maseeh
Microelectromechanical systems
InvenSense
CEA-Leti: Laboratoire d'électronique des technologies de l'information
Journal of Microelectromechanical Systems
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